Other Products
SEMCTCEH specializes in the integrated development, production and sales of wet process equipment.
Single-Wafer Wet Brush Scrubbing Equipment
| Item | Specification |
| Application Field | Wafer-level wafer manufacturing (silicon, silicon carbide) and advanced packaging fields |
| Wafer Specifications | 150mm~300mm 2~4 load ports Wafer size Wafer flip function for sequential backside and frontside cleaning Equipped with backside brush scrub and edge brush scrub Megasonic cleaning process and two-fluid cleaning Supports SECS/GEM communication protocol |
| Process Standards | Particles <20ea@0.16um PRE ≥97% @ 0.09um |
